Design and Construction of a Microwave Plasma Ion Source

摘要

This thesis is about the designing and constructing a microwave ion source.The ions are generated in a thermal and dense hydrogen plasma by microwaveinduction. The plasma is generated by using a microwave source with a frequencyof 2.45 GHz and a power of 700 W. The generated microwave is pulsing with afrequency of 50 Hz. The designed and constructed microwave system generateshydrogen plasma in a pyrex plasma chamber. Moreover, an ion extraction unit isdesigned and constructed in order to extract the ions from the generatedhydrogen plasma. The ion beam extraction is achieved and ion currents aremeasured. The plasma parameters are determined by a double Langmuir probe andthe ion current is measured by a Faraday cup. The designed ion extraction unitis simulated by using the dimensions of the designed and constructed ionextraction unit in order to trace out the trajectories of the extracted ions.